发明名称 Integrated circuit device comprising low dielectric constant material for reduced cross talk
摘要 A low dielectric material is applied, as by spinning on, over the passivation layer of a semiconductor chip to fill the gaps which may exist between the top layer metal lines, and thereby minimize the possibility of cross talk which might otherwise be present between those lines.
申请公布号 US6522005(B1) 申请公布日期 2003.02.18
申请号 US20000618991 申请日期 2000.07.18
申请人 HYUNDAI ELECTRONICS AMERICA INC. 发明人 ALLMAN DERRYL D. J.;FUCHS KENNETH P.;MILLER GAYLE W.;GIOIA SAMUEL C.
分类号 H01L21/768;H01L21/316;H01L21/324;H01L21/822;H01L23/14;H01L23/31;H01L23/522;H01L27/04;(IPC1-7):H01L23/48 主分类号 H01L21/768
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