发明名称 |
Method and apparatus for a direct bonded isolated pressure sensor |
摘要 |
A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
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申请公布号 |
US6520020(B1) |
申请公布日期 |
2003.02.18 |
申请号 |
US20000478383 |
申请日期 |
2000.01.06 |
申请人 |
ROSEMOUNT INC. |
发明人 |
LUTZ MARK A.;FRICK ROGER;SITTLER FRED C.;TOY ADRIAN C. |
分类号 |
G01L9/12;G01L9/00;(IPC1-7):G01L7/00 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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