发明名称 |
Perforated anode for uniform deposition of a metal layer |
摘要 |
An apparatus and associated method for use in a metal deposition cell during operation. The apparatus includes a perforated anode extending generally horizontally across the entire width of the metal deposition cell. Multiple perforations extend substantially vertically and are arranged to provide a substantially uniform electrolyte flow across the width of the metal deposition cell.
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申请公布号 |
US6521102(B1) |
申请公布日期 |
2003.02.18 |
申请号 |
US20000534951 |
申请日期 |
2000.03.24 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DORDI YEZDI N. |
分类号 |
C25D17/00;C25D7/06;C25D7/12;C25D17/06;C25D17/10;C25D17/12;C25D21/06;C25D21/10;H01L21/20;H01L21/288;(IPC1-7):C25D17/00;C25D5/08 |
主分类号 |
C25D17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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