发明名称 Perforated anode for uniform deposition of a metal layer
摘要 An apparatus and associated method for use in a metal deposition cell during operation. The apparatus includes a perforated anode extending generally horizontally across the entire width of the metal deposition cell. Multiple perforations extend substantially vertically and are arranged to provide a substantially uniform electrolyte flow across the width of the metal deposition cell.
申请公布号 US6521102(B1) 申请公布日期 2003.02.18
申请号 US20000534951 申请日期 2000.03.24
申请人 APPLIED MATERIALS, INC. 发明人 DORDI YEZDI N.
分类号 C25D17/00;C25D7/06;C25D7/12;C25D17/06;C25D17/10;C25D17/12;C25D21/06;C25D21/10;H01L21/20;H01L21/288;(IPC1-7):C25D17/00;C25D5/08 主分类号 C25D17/00
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