| 摘要 |
A surface acoustic wave device (1) includes a piezoelectric plate (2) and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film (5a) and a second metallic thin film (5b) laminated on the first metallic thin film (5a) and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film (5b) is alpha -tantalum. <IMAGE> |
