TEMPERATURE CONTROL METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

摘要

PURPOSE: A temperature control method and a semiconductor device manufacturing method are provided to maintain the accuracy of control based on a detected value of a temperature sensor substantially constant regardless of a change in an error of measurements of the temperature sensor. CONSTITUTION: The temperature control method includes determining in advance a correction value for the temperature control parameter that changes in accordance with the progress of the processing of a substrate(2), and making the temperature control parameter to be changed in accordance with the correction value thus determined when the substrate is processed.