TRAY LOCK STRUCTURE FOR PROBE EQUIPMENT

摘要

PURPOSE: A tray lock structure for probe equipment is provided to avoid fluctuation of a tray by eliminating vertical motion of the tray and minimizing a variation of a horizontal position of the tray caused by the weight of a probe card. CONSTITUTION: A casing is prepared. A wafer chuck on which a wafer is placed is installed inside the casing. An insert ring is supported by the casing, disposed over the wafer chuck. The probe card is detachably adhered to the insert ring, having a plurality of contactor in contact with a plurality of electrode pads of an integrated circuit(IC) chip. The probe card is automatically attached/detached to/from the insert ring by using the tray(21). The tray transfers the probe card between an initial position outside the casing and a position inside the casing. A pair of brackets(24) are installed at the right and left sides of a pivot holder(20) to support the tray in such a way that the tray is freely rotated. A lock unit(27) locks/unlocks the tray while the tray is being used.