| 摘要 |
PURPOSE: To provide a highly-sensitive charged particle measuring device capable of measuring efficiently the charged particles in an extremely low level having an identified charged-particle nuclide. CONSTITUTION: This charged particle measuring device is provided with a measuring sample 2 and a semiconductor detector 1 in a measuring chamber 7 having an openable/closable sealing door 15 installed thereon. The device is equipped with a radiation measuring circuit 30 connected to the semiconductor detector 1 and constituted from a preamplifier 30c, a linear amplifier 30d and a wave height analyzer 30e, a charged-particle emission quantity operation device 40 for quantitating the charged particles from the measured value, and a display for displaying the analysis result. The device is also provided with a depressurizing evacuation piping system in the measuring chamber 7, and a clean gas supply piping system for supplying the clean gas to replace therewith.
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