| 摘要 |
PURPOSE: A method for manufacturing a liquid discharging head, a substrate for the liquid discharging head and a method for processing the substrate are provided to supply a method for manufacturing an ink jet recording head for stably setting an opened width of an ink supply port, which is formed on the surface of the substrate by the anisotropic etching of Si, with high accuracy in a predetermined width. CONSTITUTION: An ink supply port(9) is opened in an Si substrate(1) on which an ink discharge energy generating element(2) is formed, by anisotropic etching from a back surface opposite to a surface on which the ink discharge energy generating element is formed. When the anisotropic etching is effected, an OSF(Oxidation Induced Laminate Defect) remains on the back surface of the Si substrate with OSF density equal to or greater than 2x10¬4 parts/cm¬2 and a length of the OSF equal to or greater than 2 micro meter. |
