发明名称 |
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD |
摘要 |
PURPOSE: To provide a semiconductor device improved in drain breakdown voltage. CONSTITUTION: This semiconductor device is constituted by forming a P-type well region 5 in a P-type semiconductor substrate 1, at least a thick gate insulating film 9 and a thin gate insulating film 10 on the region 5, and a gate electrode (25E) via the gate insulating films 9 and 10. The impurity injected into a portion below the electrode (25E) through ion implantation for adjusting threshold voltage is injected only into the lower part of the thick gate insulating film 10 in this invention.
|
申请公布号 |
KR20030014157(A) |
申请公布日期 |
2003.02.15 |
申请号 |
KR20020047053 |
申请日期 |
2002.08.09 |
申请人 |
SANYO ELECTRIC CO., LTD. |
发明人 |
KIKUCHI SHUICHI;MOMEN MASAAKI |
分类号 |
G02F1/1345;G02F1/1368;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L29/78 |
主分类号 |
G02F1/1345 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|