APPARATUS AND METHOD FOR FIXING DEPOSITION MASK IN FABRICATING PROCESS OF ORGANIC ELECTRO-LUMINESCENCE FLAT DISPLAY

摘要

PURPOSE: An apparatus and a method for fixing a deposition mask in a fabricating process of an organic electro-luminescence flat display are provided to prevent wrinkles of a mask and a sinking phenomenon of a panel by applying tension to the deposition mask. CONSTITUTION: A clamper(501) is located at a lower portion of a glass chucking plate(502). The clamper(501) is used for fixing a glass(5). A mask(504) is contacted with the glass(5). A mask holder(15) is formed at a lower portion of the glass chucking plate(502) in order to maintain tension of the mask(504). A target(507) is supplied to a deposition source(505). The target(507) is heated during a predetermined time by using a heater(506). The mask(504) is stretched on the mask holder(15). The glass(5) is fixed to the glass chucking plate(502) by using the clamper(501). A sinking phenomenon of a panel is prevented by using a rib.