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发明名称	KATHODENBOGENQUELLE
摘要
申请公布号	AT232013(T)	申请公布日期	2003.02.15
申请号	AT19970932940T	申请日期	1997.07.24
申请人	FILPLAS VACUUM TECHNOLOGY PTE LTD.	发明人	SHI, XU;TAY, BENG, KANG;TAN, HONG, SIANG;FLYNN, DAVID, IAN
分类号	C23C14/35;C23C14/06;C23C14/32;C23C14/34;H01J27/14;H01J37/32;H01J37/34;(IPC1-7):H01J37/32	主分类号	C23C14/35
代理机构		代理人
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地址

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