| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezo-electric vibrator and its manufacturing method that can realize structural processing of a piezo-electric substrate required for energy confinement with high accuracy, excellent reproducibility and most suitable mass-productivity and prevent such problems as dispersion in resonance characteristics, temperature characteristics of frequency and equivalent circuit constants of the piezo-electric vibrator due to deterioration in chamfering processing size accuracy of a small-sized piezo-electric substrate. SOLUTION: In the piezo-electric vibrator with a piezo-electric substrate that has thickness-shear vibration as major vibration, stimulation electrodes are formed at the center on both major sides of the piezo-electric substrate, and a plurality of grooves or holes are formed between the ends of the piezo-electric substrate in the length direction and the stimulation electrode by using photolithography and etching technologies, or a doping layer is formed by the ion implantation to confine energy in a vibration region just below the stimulation electrode.</p> |
