| 摘要 |
PROBLEM TO BE SOLVED: To provide a Josephson junction which is tolerant to fluctuations in a polishing rate, superior in manufacturing yield, and subjected to a polishing process whose end point can be surely detected, and to provide its manufacturing method. SOLUTION: An interlayer insulating layer is laminated on a counter electrode where a Josephson junction is formed, a polishing end point detection layer formed of material harder than that of the interlayer insulating layer is provided inside the interlayer insulating layer, and the interlayer insulating layer is made to keep undergoing a chemical mechanical polishing(CMP) process until the polishing end point detection layer is eliminated and then etched back through a reactive ion etching(RIE) method.
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