发明名称 |
METHOD FOR MANUFACTURING II-VI GROUP DEVICE USING POROUS FILM AND ITS STRUCTURE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a II-VI group semiconductor material that has high quality and no defect even if a substrate and a semiconductor material formed thereon have lattice constants different to each other, and to provide its structure. SOLUTION: This device is provided with a porous layer pinched by a semiconductor substrate and a first semiconductor film and a second semiconductor film formed on the first semiconductor film, and the second semiconductor film contains a II-VI group compound semiconductor. |
申请公布号 |
JP2003046199(A) |
申请公布日期 |
2003.02.14 |
申请号 |
JP20010228214 |
申请日期 |
2001.07.27 |
申请人 |
CANON INC |
发明人 |
MIYAZAWA SEIICHI;OKUDA MASAHIRO;EZAKI MIGAKU |
分类号 |
H01L21/205;H01L33/06;H01L33/28;H01L33/30;H01S5/327 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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