发明名称 METHOD FOR MANUFACTURING II-VI GROUP DEVICE USING POROUS FILM AND ITS STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a method for forming a II-VI group semiconductor material that has high quality and no defect even if a substrate and a semiconductor material formed thereon have lattice constants different to each other, and to provide its structure. SOLUTION: This device is provided with a porous layer pinched by a semiconductor substrate and a first semiconductor film and a second semiconductor film formed on the first semiconductor film, and the second semiconductor film contains a II-VI group compound semiconductor.
申请公布号 JP2003046199(A) 申请公布日期 2003.02.14
申请号 JP20010228214 申请日期 2001.07.27
申请人 CANON INC 发明人 MIYAZAWA SEIICHI;OKUDA MASAHIRO;EZAKI MIGAKU
分类号 H01L21/205;H01L33/06;H01L33/28;H01L33/30;H01S5/327 主分类号 H01L21/205
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