| 摘要 |
PROBLEM TO BE SOLVED: To realize a microstructure, which has a thick movable section and a wide space between the movable section and a fixed section, and still has a structure layer, such as an electrode disposed above the movable section and the space between the movable section and the fixed section. SOLUTION: A method of manufacturing the microstructure comprises (1) forming of projecting patterns, which are divided into the movable section 106a which becomes movable at the end of manufacturing, the fixed section 106c spaced apart from the movable sections 106a, and a dummy section 106b which is disposed in the space between the movable section 106a and the fixed section 106c and disappears at end of manufacturing, (2) depositing a sacrificial layer, in a region which begins from the movable section 106a and reaches the fixed section 106c via the dummy section 106b, (3) forming a structure layer on the sacrificial layer, (4) after depositing the sacrificial layer or forming the structure layer, removing the dummy section 106b, and (5) after forming the structure layer, removing the sacrificial layer. |
