| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic film which is made to have a saturation magnetic flux density Bs of 2.0 T or higher and improved in corrosion resistance by adding precious metal elements such as Pd and Rh to an FeCo alloy, a thin film magnetic head using the same, and methods of manufacturing a soft magnetic film and a thin film magnetic head. SOLUTION: A lower magnetic layer 19 and/or an upper magnetic layer 21 is formed of an FeXCoYαZ, where the ratio the composition ratio X (mass%) of Fe/the composition ratio Y (mass%) of Co is set at 2 to 5, the composition ratio Z of an elementα(where an elementαis Pd or the like) is set equal to 0.5 to 18 mass.%, and X, Y and Z are so set as to satisfy the formula X+Y+Z=100 mass.%. By this setup, a thin film magnetic head, which has a saturation magnetic flux density of 2.0 or above and is capable of coping with high-density recording, can be manufactured.
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