| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inspection system which is enabled to perform control including an implementation process for actual inspection and can efficiently and flexibly inspect an electronic device, etc., even under various unexpected restricting conditions. SOLUTION: This inspection system is equipped with a measurement path generating means which forms measurement paths for an object to be inspected and a measuring instrument, a database which holds information regarding the inspection, an inspection scheduling means which generates an inspection sequence by using the information in the database, and a controller which controls the object to be inspected, measurement path setting means, and measuring instrument according to the inspection sequence. This system can efficiently use resources since the inspection scheduling means can compute the inspection sequence according to various given conditions.</p> |
