| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor which will not peel off, even if an upper electrode becomes thin, for reducing the electrical resistance. SOLUTION: In this thin film capacitor, where a support board 1 is covered with a lower electrode layer 2, a thin film dielectric layer 3, and an upper electrode layer 4 in this order, the dielectric layer 3 consists of a dielectric layer 3a of high dielectric constant, consisting of perovskite-type oxide crystal particles containing at least Ba, Sr and Ti, and a dielectric layer 3b of low dielectric constant, consisting of oxide particles containing at least Ba and Sr.
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