| 摘要 |
PROBLEM TO BE SOLVED: To provide a simulation system, with which the tunnel current of quantum mechanics can be accurately calculated, without having to depend on human experience or intuitions. SOLUTION: This system is provided with an initial mesh-dividing part 1, mesh information storage part 2, first simulation part 3, extraction part 4, mesh redividing part 5, second simulation part 6 and simulation result deciding part 7. The tunnel current of each of grid points comprising a mesh is detected, a grid point, where the ratio of the detected tunnel current to a maximum value exceeds a prescribed value, is extracted and simulation is re-executed, after newly adding grid points around the extracted grid point. Thus, the mesh is set fine in the area of high probability of tunneling, the tunnel current can be analyzed, and accuracy in the calculation of the tunnel current becomes improved.
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