发明名称 FINGERSTALL FOR FAILURE ANALYSIS
摘要 PROBLEM TO BE SOLVED: To provide a fingerstall for failure analysis with which an object can be easily and firmly pressed to a polishing surface, the object can be easily polished, and the load to the finger in pressing the object to the polishing surface can be reduced. SOLUTION: This fingerstall 10 for failure analysis is used by putting it on a finger when pressing the object to a polishing surface of a polishing machine by the finger. The fingerstall is provided with a cylindrical main body 1 having a finger insertion opening 5, a pressing part 4 that presses the object to the polishing surface, and a slip-preventing means 3 that prevents slippage between the pressing part 4 and the object when polishing.
申请公布号 JP2003045827(A) 申请公布日期 2003.02.14
申请号 JP20010228650 申请日期 2001.07.27
申请人 UMC JAPAN 发明人 AMI YUKA
分类号 H01L21/306;H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/306
代理机构 代理人
主权项
地址
您可能感兴趣的专利