Making probes for scanning probe microscopy, forms point on substrate and transfers it between substrates with the assistance of adhesive bonds

摘要

At least one pointed probe head (2) is made on a third substrate (1). An adhesive bond is made between the head (2) and a first substrate (3). The probe head (2) is separated from the third substrate (1). An adhesive bond is formed between it (2) and the second substrate (5). The probe head is separated from the first substrate. An Independent claim is included for first and second intermediate products of the process.