MANUFACTURING METHOD OF ELECTRON EMISSION ELEMENT, ELECTRON SOURCE AND IMAGE FORMATION EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron emission element with a deposit of carbon of carbon compound contained at least in one of the pair of conductive bodies and aim at stabilized characteristics by forming a film of carbon or carbon compound with good crystallinity within a short period of time. SOLUTION: The deposition process of carbon or carbon compound 4a is composed of two or more processes including a first and a second process. The first process is performed in the atmosphere of carbon compound gas with molecular weight of 100 more and the second process following the first one is performed in the atmosphere of carbon compound gas with molecular weight of less than 100.