| 摘要 |
PROBLEM TO BE SOLVED: To prolong the life time of the laser transmitter of an aligner, and shorten the standby time of a wafer. SOLUTION: In order to shorten the operating time of a gas diffusing fan 3a for preparing oscillation of a laser beam oscillator 3, on a carrying route for carrying a wafer to and from a wafer stage 2 by a wafer-carrying robot 7, the operation of the gas diffusing fan 3a is started, when the wafer is carried to the wafer receiving base 4. Further, a light source control system 10 is provided, so that the absence of the subsequent wafer on the carrying route is confirmed at completion of exposure on each lot and the operation of the gas diffusing fan 3a is stopped, when the last wafer is carried from the wafer stage 2. |
