发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To form a capacitor realizing large size and high voltage resistance of a capacity by enlarging an electrode area for the capacitor without involving the large size of chip size of a semiconductor device. SOLUTION: The inside of an insulation separation trench 6 is filled with an embedded polysilicon 6b introducing an N type impurity. The embedded polysilicon 6b functions as a first electrode part of the capacitor making a side wall oxidation film 6a of the insulation separation trench 6 a dielectric thin film. An N<+> dispersion layer 16 introducing the N type impurity is formed in a monocrystal silicon layer 11 with an element formation area 5 divided by the insulation separation trench 6. The N<+> dispersion layer 16 functions as a second electrode part of the capacitor.
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申请公布号 |
JP2003045988(A) |
申请公布日期 |
2003.02.14 |
申请号 |
JP20010234928 |
申请日期 |
2001.08.02 |
申请人 |
DENSO CORP |
发明人 |
IIDA MAKIO;BAN HIROYUKI;IWAMORI NORIYUKI |
分类号 |
H01L21/331;H01L21/76;H01L21/762;H01L21/822;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/04;H01L27/06;H01L27/08;H01L27/12;H01L29/732;(IPC1-7):H01L21/822;H01L21/824 |
主分类号 |
H01L21/331 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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