| 摘要 |
PROBLEM TO BE SOLVED: To resolve a problem where, whenever a cell arrangement pattern changes, a pattern recognition with the use of a program corresponding to it becomes necessary, and a test time is also prolonged in proportion to the number of cells in a conventional measuring method that the relationship between an applied voltage V and a current I is measured by making a probe contact the surface of a semiconductor wafer. SOLUTION: The semiconductor wafer is set at a prescribed position on a table, and the roller-shaped probe having a conductive periphery, with the length to cover the region where the cells are arranged, is made to come into contact with a plurality of cells, and then a combined current is measured.
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