STRUCTURE FOR RADIAL LINE SLOT ANTENNA IN PLASMA PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a radial line slot antenna for a plasma processing device where the close adhesion between a metallic plate having many also holes configuring the radial slot antenna and a dielectric material placed at an opposite side to a microwave radiation face of the metallic plate is improved so as to enhance the radiation efficiency and the uniformity of microwaves and cope with a substrate with a large area to be processed. SOLUTION: The radial line slot antenna where a waveguide circuit is configured with the metallic plate to which many slot holes are formed and a recessed conductor connected to a coaxial waveguide transducer, and a dielectric material is filled in the waveguide circuit adopts a structure in which the metallic plate and the dielectric material are closely adhered by metallize joining or a structure in which a female thread section provided to the dielectric material and a thread screwed to the female thread section are closely screwed.