Charged particle beam control system and charge partical beam optical apparatus using the system

摘要

A charged particle beam control system wherein electrodes and magnetic poles can be positioned accurately and easily is provided, together with a charged particle beam optical apparatus and a charged particle beam defect inspection apparatus, which use the charged particle beam control system. A part of a ceramic material is coated with a metal to form a pair of mutually opposing electrodes, and a pair of magnetic poles perpendicularly intersecting the pair of electrodes are provided to construct a Wien filter A. Side surfaces are formed on portions of the electrodes that are not coated with the metal, and first positioning surfaces are formed on the magnetic poles. The electrodes and the magnetic poles are positioned relative to each other by bringing the side surfaces and the positioning surfaces into abutting contact with each other, thereby allowing the electrodes and the magnetic poles to be positioned.