发明名称 |
Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
摘要 |
A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study. A method for manufacturing dielectric support member based probes includes anisotropically depositing a 50-100 Å thick underlayer of Cr, Ni, W or Ta onto the dielectric support member, anisotropically depositing conductive material onto the Cr, Ni, W or Ta underlayer, and removing the unwanted conductive material at the sides of the dielectric support member to electrically isolate the created conductive strips.
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申请公布号 |
US2003030449(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
US20020266611 |
申请日期 |
2002.10.09 |
申请人 |
MORELAND ROBERT L.;CHRISTEN HANS M.;TALANOV VLADIMIR V.;SCHWARTZ ANDREW R. |
发明人 |
MORELAND ROBERT L.;CHRISTEN HANS M.;TALANOV VLADIMIR V.;SCHWARTZ ANDREW R. |
分类号 |
G01R27/06;G01N22/00;G01Q10/00;G01Q60/18;G01Q60/22;G01Q60/46;G01Q70/16;G01R1/06;G01R27/26;(IPC1-7):G01R27/04;G01R27/32 |
主分类号 |
G01R27/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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