| 摘要 |
Apparatus and method for producing a phase image by irradiating an object with electrons is disclosed. The method and apparatus include producing in focus and defocused images of the object by focusing an electron beam with a magnetic lens and controlling the magnetic lens so as to adjust the position of the focus so as to produce the in focus and defocused images. The defocused images are processed to remove distortions introduced when the defocused images are produced by transforming the defocused images in accordance with a transformation to compensate for those distortions. The transformation may be in accordance with a transformation determined by imaging a known reference grid and determining a transformation to return that grid to its known position, or by comparing the defocused images with the in focus image, and using the in focus image as the reference for determining a transformation to transform the defocused images. |
