| 摘要 |
<p>A bonded structure of a plane optical waveguide and a metal member which is highly reliable without involving the deformation of bonding members. An optical waveguide module which can efficiently deliver desired setting functions by reliably bonding a plane optical waveguide to a metal member. For example, a metal film (11b) is formed on the bonding surface of a plane optical waveguide (20) such as an array waveguide diffraction lattice, and a metal film (11a) is formed on the bonding surface of a metal member (7). The metal member (7) is bonded to the plane optical waveguide (20) by means of diffusion bonding between the metal film (11a) and the metal film (11b). A slide moving member (17) is bonded to the metal member (7). The slide moving member (17) moves a separated slab waveguide, separated by the separation surface of the plane optical waveguide (20), along the separation surface to reduce the dependency of the array waveguide diffraction lattice on light transmission center wavelength temperature.</p> |
