Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung

摘要

A ceramic diaphragm structure which includes a ceramic substrate (4; 28, 30) having at least one window (6; 36), and a ceramic diaphragm plate (8; 26) which is superposed on the ceramic substrate so as to close the window or windows. The diaphragm plate is fired with the ceramic substrate to form an integral sintered body. The diaphragm plate includes at least one diaphragm portion (10) which is aligned with the window(s), and which protrudes outwards, in a direction away from the corresponding window, to form a convex shape. Also disclosed is a method of protuding such a ceramic diaphragm structure, in which the diaphragm portion is formed into convex shape, upon firing of the ceramic substrate and ceramic diaphragm plate.