Force sensitive micro manipulator has vibration of gripper sensed to determine engagement with work to be measured

摘要

The force sensitive micro manipulator measurement method involves using a clamping cheek (2) as part of a spring tongue (3) which is vibrated. The alteration of the vibration during contact with an article to be measured through the spring tongue is monitored. The vibration alteration value is used to control the force application and grip of the manipulator. An Independent claim is included for a micro manipulator using the method.