| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress distortion of a pellicle due to load in mounting and deformation of a pellicle frame due to residual stress generated in the process of forming ventilating holes. SOLUTION: A pellicle frame 3 comprises quartz glass, each of opposite lateral faces of the pellicle frame 3 has a plurality of aligned ventholes 2 and the diameter of the ventholes 2 in the height direction of the pellicle frame 3 is <=3/5 of the height of the pellicle frame 3.</p> |
