| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an automatic tracking device for generating the second harmonic of laser light which is easy to adjust and has high accuracy and high reliability. SOLUTION: The automatic tracking device is provided with the final amplification stage in a multi-path amplification system which has a pigment cell, an exciting laser and a plurality of mirrors, nonlinear optical crystal on which output light from the final amplification stage is made incident and which outputs the second harmonic and is arranged on a rotary stage, a beam splitter which splits output light from the nonlinear optical crystal, a visible light absorbing and ultraviolet light transmission filter which selectively takes out the second harmonic from light from the beam splitter, an image sensor which measures the position and the shape of the taken-out second harmonic, and a controller which changes the position in the peripheral direction of the rotary stage, on which the nonlinear optical crystal is arranged, on the basis of the beam position deviation detection result of the image sensor to control the angle of incidence of input light on the nonlinear optical crystal.</p> |
