| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment device having a substrate carrying device comprising structurally high-strength rotary shafts and capable of easily changing a seal member of a bearing device for supporting the rotary shafts. SOLUTION: This substrate treatment device is provided with a treatment tank 101, the multiple rotary shafts 111' aligned in the treatment tank with their end parts projecting outward, substrate carrying means 110 having multiple bearing units 10 individually and rotatably supporting the end parts of the respective rotary shafts and individually and detachably attached to the treatment tank, and carrying the substrates by the rotation of the respective rotary shafts, and treatment liquid discharge means 105 discharging the treatment liquid to the carried substrates. Each of the rotary shafts comprises, at least, an inseparable rod, the bearing unit is provided with the bearing supporting the rotary shaft, a housing retaining the bearing on one side of a through hole, a hermetical member having an insertion hole for inserting the rotary shaft and having its one end side airtightly inserted in the other side of the housing through hole, and the seal member sealing an interval between the rotary shaft and the hermetical member. |
