| 摘要 |
PROBLEM TO BE SOLVED: To provide a probing system which can remove the influence of stray a capacitance and carry out high-precision measurement. SOLUTION: This is a probing system equipped with a prober 1 and a capacitance measuring circuit 6. The prober 1 has a sealed box 11, and a signal cable 7 whose one end (its internal conductor 72) as a detecting probe comes in contact with a sample to be measured and is covered with an external conductor 71. The measuring circuit 6 has a voltage follower (an operational amplifier 61) whose non-inversion input terminal is connected to the internal conductor 72 of the signal cable, 7, and whose output terminal is connected to the external conductor 71, a resistor (R3) 67 whose one end is connected to the internal conductor 72, and an operational amplifier 60 whose output terminal is connected to the other end of the resistor (R3) 67 so that the resistor (R3) 67 and the operational amplifier 61 are included in the negative feedback route.
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