| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring microscope that can execute every kind of accurate measurement to a sample with reducing the number of parts. SOLUTION: A stage position is detected by a position detecting unit 11 and a counter 12 from the movement quantity of a movable stage 1 mounting a sample 2. This detected stage position information and the quantity of light from the sample 2 detected by a photodetector 9 are recorded into a ROM 16. Then every kind of measurement to the sample 2 is executed based on the record information of the ROM 16.
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