发明名称 Structure of semiconductor device and method for manufacturing the same
摘要 A semiconductor device and a method for manufacturing the same are provided. The structure of a semiconductor device includes gate electrodes having a T-shaped structure comprised of first and second gate electrodes having low gate resistance and low parasitic capacitance and a halo ion-implanted region in which a short channel effect can be effectively suppressed. The method for manufacturing the device is capable of performing high angle ion implantation without extending gate-to-gate space.
申请公布号 US2003030103(A1) 申请公布日期 2003.02.13
申请号 US20020144962 申请日期 2002.05.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 RYU HYUK-JU;AHN JONG-HYON
分类号 H01L29/423;H01L21/265;H01L21/28;H01L21/336;H01L21/8234;H01L29/49;H01L29/78;H04B7/26;H04H1/02;H04N7/08;H04N7/081;H04N7/173;H04W4/06;H04W4/18;H04W88/02;(IPC1-7):H01L29/76 主分类号 H01L29/423
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