发明名称 |
Measuring apparatus |
摘要 |
A measuring apparatus comprises a heating unit for applying heat to a first point within a workpiece or on a surface of a workpiece and propagating the heat to a second point within the workpiece or on the surface of the workpiece. The measuring apparatus further comprises a measuring unit for measuring a displacement of the surface of the workpiece at the second point to which the heat has been propagated, and an analyzing unit for analyzing a structure of the workpiece based on the displacement measured by the measuring unit in consideration of a distance between the first point and the second point.
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申请公布号 |
US2003032377(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
US20020213109 |
申请日期 |
2002.08.07 |
申请人 |
TADA MITSUO;SUTO YASUNARI |
发明人 |
TADA MITSUO;SUTO YASUNARI |
分类号 |
G01N25/16;B24B37/04;B24B49/04;B24B49/10;B24B49/14;G01B11/06;G01B17/02;H01L21/304;H01L21/66;(IPC1-7):B24B5/00 |
主分类号 |
G01N25/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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