| 摘要 |
<p>A differential pressure sensor chip (4) comprises a diaphragm for measuring pressure difference and converts a pressure received by this diaphragm into an electrical signal. An electrostatic pressure sensor chip (5) comprises a diaphragm for measuring an electrostatic pressure and converts a pressure received by this diaphragm into an electrical signal. The differential pressure sensor chip (4) and an electrostatic pressure sensor chip (5) are mounted on a header (1) so that one face of the sensor chip (4) and one face of the sensor chip (5) may be exposed to the interior of a common pressure introducing chamber (17).</p> |
