发明名称 |
HEAT TREATMENT APPARATUS |
摘要 |
The exhaust pressure in an exhaust system (15) for exhausting a treatment furnace (2) is measured as an absolute pressure by a differential pressure gage (23) for measuring the pressure as the differential pressure between the exhaust pressure and the atmospheric pressure and an aneroid barometer (31) for measuring the atmospheric pressure as an absolute pressure. The opening of a pressure−varying valve (25) is adjusted according to the determined absolute exhaust pressure, and the pressure in the treatment furnace (2) is adjusted thereby.
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申请公布号 |
WO03012849(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
WO2002JP02711 |
申请日期 |
2002.03.20 |
申请人 |
TOKYO ELECTRON LIMITED;SAITO, YUKIMASA |
发明人 |
SAITO, YUKIMASA |
分类号 |
C23C16/455;C23C16/44;C23C16/52;F27B5/16;F27B5/18;F27D7/06;F27D19/00;H01L21/00;H01L21/22;H01L21/31;(IPC1-7):H01L21/31 |
主分类号 |
C23C16/455 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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