| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrying device and method capable of surely carrying even thin materials to a prescribed direction, dispensing with a sliding part, between a substrate and a carrying mechanism, and having a short carrying cycle time. SOLUTION: This substrate carrying device is provided with substrate retaining chucks A1 and A2, substrate carrying chucks B1, B2, and B3, and chuck control means for controlling these operations. The both chucks can take two types of states of a retaining state retaining the both ends of the substrate 1 and a released state of not retaining them. The chuck control means alternately take a working state of retaining one of the both chucks and releasing the other and its reverse working state, and controls the substrate carrying chucks B1, B2, and B3 to move frontward in the carrying direction under their retained state. |
