发明名称 |
TESTING VIAS AND CONTACTS IN INTEGRATED CIRCUIT FABRICATION |
摘要 |
A test arrangement is designed to test whether one in a chain of vias or contacts has abnormally high resistance. The arrangement contains a plurality of via or contact chains (161-164) and a plurality of decoders (166-169). The chains are switchably connected to a resistance measurement device. Each decoder has a unique address such that it will generate a control signal when a predetermined address is address thereon. The control signal is used to close a switch, which connect one of the chains to the resistance measurement device. By sequentially applying different addresses to the decoders, the resistance of the chains can be individually measured. |
申请公布号 |
WO03012857(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
WO2002US23838 |
申请日期 |
2002.07.26 |
申请人 |
XILINX, INC. |
发明人 |
CHAO, TAI-AN;LING, ZICHENG, G.;HSUEH, SHIHCHENG |
分类号 |
G01R27/02;G01R31/28;H01L21/66;H01L21/822;H01L23/544;H01L27/04 |
主分类号 |
G01R27/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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