| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus which can reduce the occupation floor area and which executes an HTS capable of realizing an efficient operation. SOLUTION: An inspection unit 1 in which a dispensing device 2, an incubator 3, a measuring device 4 and a stocker 5 as a device group for an inspection process are arranged in the up-and-down direction, an inspection station S1 having an inspection-side robot 6 operated in the up-and-down direction and a cassette stocker S2 which has a shelf 11 used to house a plurality of cassettes 8, a washing machine 12, a cassette-side robot 13 and a cassette conveyance vehicle 14, are installed so as to be adjacent to each other.
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