DUST DETECTOR FOR CLEAN ROOM, DUST DETECTION SYSTEM, MEASUREMENT INSTRUMENT FOR FINE PARTICULATE, AND METHOD OF DETECTING DUST

摘要

PROBLEM TO BE SOLVED: To provide a dust detection system capable of accurately detecting dust. SOLUTION: The image of a dust collection sheet 11 which accumulated with the dust on a surface 11s is transmitted through the diffusion sheet 12 in dust detector 10, and photographed by a CCD camera 15 via a lens 13 and a lens 14. The image data of the image, photographed by the dust detector 10, are transmitted to an analysis computer 30 via a cable 18. The image data is processed by a double circumferential difference calculus in the computer 30, to detect the number and a shape of the dust.