发明名称 |
PRESSURE SENSOR |
摘要 |
A differential pressure sensor chip (4) comprises a diaphragm for measuring pressure difference and converts a pressure received by this diaphragm into an electrical signal. An electrostatic pressure sensor chip (5) comprises a diaphragm for measuring an electrostatic pressure and converts a pressure received by this diaphragm into an electrical signal. The differential pressure sensor chip (4) and an electrostatic pressure sensor chip (5) are mounted on a header (1) so that one face of the sensor chip (4) and one face of the sensor chip (5) may be exposed to the interior of a common pressure introducing chamber (17).
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申请公布号 |
WO03012386(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
WO2002JP07806 |
申请日期 |
2002.07.31 |
申请人 |
YAMATAKE CORPORATION;MIYAZAWA, KEIJI |
发明人 |
MIYAZAWA, KEIJI |
分类号 |
G01L13/00;G01L13/02;G01L15/00;(IPC1-7):G01L9/00;G01L13/06 |
主分类号 |
G01L13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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