| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the influence of the sensitivity nonuniformity between line sensors to evaluate the color nonuniformity at a high accuracy in a color nonuniformity inspection of optical elements such as color filters, etc., using a plurality of line sensors. SOLUTION: The color nonuniformity generating direction of optical elements is aligned in parallel to the scanning direction of line sensors, obtained data are integrated in a direction orthogonal to the color nonuniformity generating direction, and the color nonuniformity is evaluated, based on the difference between the integrated values.</p> |
