| 摘要 |
PROBLEM TO BE SOLVED: To select an analysis region, using a technique capable of grasping the shape of a sample face by a scanning atom probe(SAP), to focus electric field in a small range formed between the sample and an extraction electrode, using an extraction electrode working technique capable of forming a micro fine funnel-like shape, and to analize only a specified protrusion in the sample. SOLUTION: When the analyzing area for the scanning atom probe(SAP) is selected, the tip of the extraction electrode for the SAP is used as a probe for a scanning tunneling microscope(STM), and the shape of the sample is plotted thereby, to select the analyzing area. A needle-like exclusive probe is formed in the tip of the extraction electrode for the SAP by a CVD microworking technique using a converged ion beam or the like, in order to enhance precision as the probe for the STM. A conical dome of a conductive material is formed in a tip part of a conical electrode, formed mechanically by a CVD working method using the converged ion beam, and the tip part is shaped by sputter etching, to form the extraction electrode close to an ideal shape. |
