| 摘要 |
PROBLEM TO BE SOLVED: To provide a bearing device capable of surely preventing a corrosive treatment liquid from infiltrating in the inside bearing and a base board treatment device provided with the bearing device. SOLUTION: There is provided with a housing 12 having a bearing rotatably supporting a rotary shaft 111 and through holes 13a, 13b, 13c and holding the bearing 11 in one side 13a of the through hole, a sealing member 20 having an insertion hole 21 in which the rotary shaft 111 is inserted and one end side is airtightly fitted to the other side 13c of the housing through hole, a first seal member 33 closely touching to both of the one side end face of the sealing member 20 and the rotary shaft 111 for sealing, and pressurized fluid supply means 35, 18, 26 feeding the pressurized fluid into the insertion hole 21 between the first seal member 33 and the second seal member 34. The treating fluid can be prevented from advancing by both of the sealing action of the second seal member 34 and the fluid stream action generated in the sealing part of the second seal member 34.
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