QUARTZ−PLANE LIGHT CIRCUIT ELEMENT AND PROCESS FOR PRODUCING THE SAME

摘要

A quartz−plane light circuit element which comprises: a monocrystalline silicon substrate or synthetic quartz glass substrate (11); a lower cladding film (13) consisting mainly of silicon dioxide and formed by vapor deposition on one side of the substrate (11); a core part (17) of a given shape consisting mainly of silicon dioxide and formed by vapor deposition on a part of the lower cladding film (13); an upper cladding film (15) which has been deposited by vapor deposition so as to cover the core part (17) and the lower cladding film (13) and which consists mainly of silicon dioxide or comprises silicon dioxide and evenly incorporated therein either phosphorus pentaoxide or phosphorus pentaoxide and boron trioxide; and a distortion−correcting film (19) consisting mainly of silicon dioxide and formed by vapor deposition on the other side of the substrate (11).